Modern methods for thin film and surface analyses

The excitation and emission phenomena and the physical properties used for the identification of elements in modern methods of thin film and surface analysis (laser optical emission spectroscopy, X-ray photoelectron spectroscopy, Auger electron spectroscopy (AES), electron microprobe analysis, scanning and transmission electron microscopy (SEM, TEM), low and high energy ion scattering spectroscopy and secondary ion mass spectrometry (SIMS)) are briefly discussed. Recent developments in and the state of the art of depth profiling (using both destructive and non-destructive methods) and microspot analysis are reviewed in depth. (Auth.)