Published January 25, 2005
| Version v1
Journal article
Fabrication and characterization of humidity sensor based on (Li2MoO4) x(CaMoO4)1-x system
- 1. Department of Electronics, Chungnam University, Daejon (Korea, Republic of)
- 2. Sensors and Advanced Materials Laboratory, Korea Institute of Energy Research, Daejon (Korea, Republic of)
- 3. Department of Chemistry, Maharshi Dayanand University, Rohtak 124-001 (India)
- 4. Molecular Physics Institute, RRC 'Kurchatov Institute', 123182 Moscow (Russian Federation)
Description
The characteristics of a humidity sensor using a water-soluble and a single crystal material with composition (Li2MoO4) x(CaMoO4)1-x, where x is 0.8-0.9 have been studied in detail. The fabrication technology has been developed for a low humidity sensor. The specific procedures with the use of polystyrol and teflon combination as protective layer have been developed for technological sensors by microelectronics techniques. The logarithm of the sensor conductance log σ is linear decreasing function of ratio log2(C s/C), where C s is the concentration of saturated water vapours and C is the concentration of water vapours to be detected up to 8000 ppm
Additional details
Identifiers
- DOI
- 10.1016/j.mseb.2004.10.012;
- PII
- S0921-5107(04)00544-6;
Publishing Information
- Journal Title
- Materials Science and Engineering. B, Solid-State Materials for Advanced Technology
- Journal Volume
- 116
- Journal Issue
- 2
- Journal Page Range
- p. 226-230
- ISSN
- 0921-5107
- CODEN
- MSBTEK
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 37114397
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- CALCIUM COMPOUNDS; CONCENTRATION RATIO; CUTTING; FABRICATION; HUMIDITY; LAYERS; LITHIUM COMPOUNDS; MICROELECTRONICS; MOLYBDATES; MONOCRYSTALS; TEFLON; WATER; WATER VAPOR
- Descriptors DEC
- ALKALI METAL COMPOUNDS; ALKALINE EARTH METAL COMPOUNDS; CRYSTALS; DIMENSIONLESS NUMBERS; FLUIDS; FLUORINATED ALIPHATIC HYDROCARBONS; GASES; HALOGENATED ALIPHATIC HYDROCARBONS; HYDROGEN COMPOUNDS; MACHINING; MATERIALS; MOISTURE; MOLYBDENUM COMPOUNDS; ORGANIC COMPOUNDS; ORGANIC FLUORINE COMPOUNDS; ORGANIC HALOGEN COMPOUNDS; ORGANIC POLYMERS; OXYGEN COMPOUNDS; PETROCHEMICALS; PETROLEUM PRODUCTS; PLASTICS; POLYETHYLENES; POLYMERS; POLYOLEFINS; POLYTETRAFLUOROETHYLENE; REFRACTORY METAL COMPOUNDS; SYNTHETIC MATERIALS; TRANSITION ELEMENT COMPOUNDS; VAPORS
Optional Information
- Copyright
- Copyright (c) 2004 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.