Published 1995
| Version v1
Miscellaneous
Open
Species retention in multi-element ion implantation
Creators
- 1. Institute of Nuclear Physics, Tomsk (Russian Federation)
- 2. Lawrence Berkeley Lab., CA (United States)
Description
Short communication
Files
28080439.pdf
Files
(22.7 kB)
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Additional details
Publishing Information
- Publisher
- Accademic Press.
- Imprint Title
- Ninth international conference on ion beam modification of materials. Book of abstracts
- Imprint Pagination
- 452 p.
- Journal Page Range
- p. 7080.
- Report number
- INIS-AU--0004
Conference
- Title
- 9. international conference on ion beam modification of materials.
- Acronym
- IBMM'95
- Dates
- 5-10 Feb 1995.
- Place
- Canberra (Australia).
INIS
- Country of Publication
- Australia
- Country of Input or Organization
- Australia
- INIS RN
- 28080439
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference, No Abstract
- Descriptors DEI
- ALUMINIUM; COPPER; ION IMPLANTATION; PULSE TECHNIQUES; RADIATION DOSES; SILICON; SPATIAL DISTRIBUTION; TITANIUM IONS; ZIRCONIUM IONS
- Descriptors DEC
- CHARGED PARTICLES; DISTRIBUTION; ELEMENTS; IONS; METALS; SEMIMETALS; TRANSITION ELEMENTS