Published 2019 | Version v1
Journal article

Application of pulse power supply for diamond coatings deposition in glow discharge plasma

  • 1. National Science Center "Kharkov Institute of Physics and Technology", Kharkiv (Ukraine)

Description

Comparative studies of diamond coatings deposition have been carried out in the glow discharge plasma stabilized by a magnetic field in methane-hydrogen medium with using the DC or pulse power supply. It was shown that using of a pulsed power supply leads to an increase of the input power range at which the discharge is stable in comparison with DC one. In addition a significant increase of the samples temperature and the diamond coating growth rate were achieved at the same average power introduced into the discharge. The resulting diamond coating was of high quality and purity.

Additional details

Publishing Information

Journal Title
Voprosy Atomnoj Nauki i Tekhniki
Journal Issue
no.1-119
Journal Page Range
p. 197-200
ISSN
1562-6016

INIS

Country of Publication
Ukraine
Country of Input or Organization
Ukraine
INIS RN
50046489
Subject category
S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
Descriptors DEI
COATINGS; DEPOSITION; DIAMONDS; GLOW DISCHARGES; HYDROGEN; MAGNETIC FIELDS; PLASMA; TEMPERATURE RANGE; THICKNESS; THIN FILMS
Descriptors DEC
CARBON; DIMENSIONS; ELECTRIC DISCHARGES; ELEMENTS; FILMS; MINERALS; NONMETALS