Published June 1998 | Version v1
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Ionization-induced damage increase in As-implanted GaAs

  • 1. Institute of Nuclear Chemistry and Technology, Warsaw (Poland)

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no abstract available

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Part of:
Annual Report of Institute of Nuclear Chemistry and Technology 1997

Additional details

Publishing Information

Imprint Title
Annual Report of Institute of Nuclear Chemistry and Technology 1997
Imprint Pagination
167 p.
Journal Page Range
p. 35-37
ISSN
1425-204X
Report number
INIS-PL--98-007

INIS

Country of Publication
Poland
Country of Input or Organization
Poland
INIS RN
29054860
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
No Abstract
Descriptors DEI
ARSENIC IONS; DOPED MATERIALS; ELASTIC SCATTERING; ELECTRON BEAMS; GALLIUM ARSENIDES; ION IMPLANTATION; PHYSICAL RADIATION EFFECTS
Descriptors DEC
ARSENIC COMPOUNDS; ARSENIDES; BEAMS; CHARGED PARTICLES; GALLIUM COMPOUNDS; IONS; LEPTON BEAMS; MATERIALS; PARTICLE BEAMS; PNICTIDES; RADIATION EFFECTS; SCATTERING

Optional Information

Notes
11 refs, 3 figs