Published April 2015
| Version v1
Journal article
Response to "Comment on 'Effect of the electron energy distribution on total energy loss with argon in inductively coupled plasmas'" [Phys. Plasmas 22, 044701 (2015)]
- 1. Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791 (Korea, Republic of)
- 2. Department of Electrical Engineering, Hanyang University, Seoul 133-791 (Korea, Republic of)
Description
no abstract available
Additional details
Identifiers
- DOI
- 10.1063/1.4916651;
Publishing Information
- Journal Title
- Physics of Plasmas
- Journal Volume
- 22
- Journal Issue
- 4
- Journal Page Range
- p. 044702-044702.1
- ISSN
- 1070-664X
- CODEN
- PHPAEN
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 46114253
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Resource subtype / Literary indicator
- No Abstract
- Descriptors DEI
- ARGON; ELECTRONS; ENERGY LOSSES; ENERGY SPECTRA; PLASMA
- Descriptors DEC
- ELEMENTARY PARTICLES; ELEMENTS; FERMIONS; FLUIDS; GASES; LEPTONS; LOSSES; NONMETALS; RARE GASES; SPECTRA
Optional Information
- Notes
- (c) 2015 AIP Publishing LLC