Published July 2001 | Version v1
Journal article Metadata-only

Preparation of cross-sectional transmission electron microscopy specimens of obliquely deposited magnetic thin films on a flexible tape

Creators

  • 1. MESA+ Research Institute, Information Storage and Technology Group (ISTG), University of Twente, P.O. Box 217, 7500 AE Enschede (NL)
  • 2. MESA+ Research Institute, Central Materials Analysis Laboratory, University of Twente, P.O. Box 217, 7500 AE Enschede (NL)

Description

In this article a method is described for preparing cross sections of obliquely deposited metal thin films on polymer substrates for transmission electron microscopy (TEM) observation. The layers of interest are brittle in nature and therefore it is difficult to obtain suitable TEM samples with conventional methods. Apart from the sample preparation method some details of the deposition technique will be elucidated

Additional details

Identifiers

DOI
10.1116/1.1330259;

Publishing Information

Journal Title
Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
Journal Volume
19
Journal Issue
4
Journal Page Range
p. 1191-1194
ISSN
0734-2101
CODEN
JVTAD6

Conference

Title
47. international symposium of the American Vacuum Society
Dates
2-6 Oct 2000
Place
Boston, MA (United States)

INIS

Country of Publication
United States
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
34071059
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S36: MATERIALS SCIENCE; S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
BRITTLENESS; DEPOSITION; MAGNETIC PROPERTIES; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY
Descriptors DEC
ELECTRON MICROSCOPY; FILMS; MECHANICAL PROPERTIES; MICROSCOPY; PHYSICAL PROPERTIES

Optional Information

Notes
(c) 2001 American Vacuum Society.