Published 2008
| Version v1
Miscellaneous
Profiler for inspection of micro/nano surface topography by method of optical interferometry
- 1. National Aviation University, Kyiv (Ukraine)
Description
The automated optical interference profiler for investigation of surface topography is developed and approved. Profiler provides 3D image of surface with nanometer vertical resolution. Consider some field of application.
Additional details
Additional titles
- Original title (Russian)
- Профилометр для контроля микро/нанотопографии поверхности методом оптической интерферометрии
Publishing Information
- Imprint Title
- Nanotechnologies. Proceedings of Kharkiv Nanotechnology Congress-2008. Volume 1
- Imprint Pagination
- 224 p.
- Journal Page Range
- p. 202-205
- Report number
- INIS-UA--145
Conference
- Title
- Kharkiv Nanotechnology Congress-2008.
- Original Conference Title
- Nanotekhnologii. Sbornik dokladov Khar'kovskoj Nanotekhnologicheskoj Assamblei-2008. Tom 1.
- Dates
- 26-30 May 2008
- Place
- Kharkiv (Ukraine)
INIS
- Country of Publication
- Ukraine
- Country of Input or Organization
- Ukraine
- INIS RN
- 41049580
- Subject category
- S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
- Resource subtype / Literary indicator
- Conference, Non-conventional Literature
- Descriptors DEI
- DESIGN; FABRICATION; IMAGES; INTERFEROMETRY; NANOSTRUCTURES; PERFORMANCE; SURFACES; USES