Published 2008 | Version v1
Miscellaneous

Profiler for inspection of micro/nano surface topography by method of optical interferometry

  • 1. National Aviation University, Kyiv (Ukraine)

Description

The automated optical interference profiler for investigation of surface topography is developed and approved. Profiler provides 3D image of surface with nanometer vertical resolution. Consider some field of application.

Part of:
Nanotechnologies. Proceedings of Kharkiv Nanotechnology Congress-2008. Volume 1

Additional details

Additional titles

Original title (Russian)
Профилометр для контроля микро/нанотопографии поверхности методом оптической интерферометрии

Publishing Information

Imprint Title
Nanotechnologies. Proceedings of Kharkiv Nanotechnology Congress-2008. Volume 1
Imprint Pagination
224 p.
Journal Page Range
p. 202-205
Report number
INIS-UA--145

Conference

Title
Kharkiv Nanotechnology Congress-2008.
Original Conference Title
Nanotekhnologii. Sbornik dokladov Khar'kovskoj Nanotekhnologicheskoj Assamblei-2008. Tom 1.
Dates
26-30 May 2008
Place
Kharkiv (Ukraine)

INIS

Country of Publication
Ukraine
Country of Input or Organization
Ukraine
INIS RN
41049580
Subject category
S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
Resource subtype / Literary indicator
Conference, Non-conventional Literature
Descriptors DEI
DESIGN; FABRICATION; IMAGES; INTERFEROMETRY; NANOSTRUCTURES; PERFORMANCE; SURFACES; USES

Optional Information