Published 1982 | Version v1
Miscellaneous

Memory effects and cleaning of plasma tubes

  • 1. Essen Univ. (Gesamthochschule) (Germany, F.R.)

Description

An argon plasma with a small admixture of H2O or O2 shows a memory effect in which material of the wall or material deposited there by previous discharges is released into the plasma. In contrast to the common cleaning of metallic surfaces with a hydrogen discharge cleaning of glass surfaces with an oxygen discharge is proposed. The enrichment of special impurity species in front of a wall is discussed. (Author)

Additional details

Publishing Information

Imprint Title
SASP '82: Symposium on atomic and surface physics
Imprint Pagination
365 p.
Journal Page Range
p. 123-128.
Report number
INIS-mf--7893

Conference

Title
Symposium on atomic and surface physics.
Acronym
SASP '82
Dates
7 - 13 Feb 1982.
Place
Maria Alm (Austria).

INIS

Country of Publication
Austria
Country of Input or Organization
Austria
INIS RN
14765783
Subject category
S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ARGON; IMPURITIES; OXYGEN; PLASMA; SURFACE CLEANING; SURFACES; TUBES; WATER
Descriptors DEC
CLEANING; ELEMENTS; HYDROGEN COMPOUNDS; NONMETALS; OXYGEN COMPOUNDS; RARE GASES; SURFACE FINISHING