Published 1997 | Version v1
Miscellaneous

X-ray grazing incidence diffraction from multilayers

  • 1. Paul Scherrer Inst. (PSI), Villigen (Switzerland)

Description

Grazing incidence scattering geometries using synchrotron radiation have been applied in order to characterise the roughness profiles and the structural coherence of multilayers. The lateral correlation length of the roughness profiles was evaluated using diffuse reflectivity in the 'out of plane' geometry. This type of measurement is the only diffuse reflectivity technique allowing large lateral momentum transfer. It is typically suitable for correlation lengths smaller than 1000 A. The lateral structural coherence length of Ni3Al/Ni multilayers as a function of the layer thickness was obtained by grazing incidence diffraction (GID). 3 figs., 1 ref

Part of:
Paul Scherrer Institut annual report 1996. Annex IIIA: solid state research at large facilities

Additional details

Publishing Information

Publisher
Paul Scherrer Institut.
Imprint Place
Villigen PSI (Switzerland)
Imprint Title
Paul Scherrer Institut annual report 1996. Annex IIIA: solid state research at large facilities
Imprint Pagination
180 p.
Journal Page Range
p. 100.
Report number
INIS-CH--004

Optional Information