Quantification in low-energy ion scattering: elemental sensitivity factors and charge exchange processes

For quantitative analysis in Low Energy Ion Scattering (LEIS), elemental sensitivity factors are needed. Here, these factors are presented for 1 keV He+ scattering from a number of pure metals. The influence of different properties of the target on neutralization of the incident ions has been studied and elemental specific neutralization constants (characteristic velocities) have been measured. An enhanced neutralization was found for elements for which ionization plays an important role. A qualitative explanation is given for this observation. ((orig.))