Published November 2000
| Version v1
Journal article
Semiempirical charge distribution of clusters in the ion sputtering of metals
Description
Well-known empirical degree law (WucherA., Wahl W., Nucl.Instrum.Meth., 1994, v.B94, p.36-42) describing relative mass spectra of neutral clusters is generalized for arbitrary cluster charges. The fluctuation mechanism of charge-structure formation of sputtering products in the form of large clusters with the number of atoms N≥5 is also proposed. the simple formula obtained by us is in very good agreement with the experimental data. (author)
Additional details
Additional titles
- Original title (Russian)
- Полуэмпирические зарядовые распределения кластеров при ионном распылении металла
Publishing Information
- Journal Title
- Uzbekiston Fizika Zhurnali
- Journal Volume
- 2
- Journal Issue
- 2
- Journal Page Range
- p. 130-136
- ISSN
- 1025-8817
INIS
- Country of Publication
- Uzbekistan
- Country of Input or Organization
- Uzbekistan
- INIS RN
- 32007784
- Subject category
- S36: MATERIALS SCIENCE; S73: NUCLEAR PHYSICS AND RADIATION PHYSICS;
- Descriptors DEI
- ATOMIC CLUSTERS; CHARGE DISTRIBUTION; CLUSTER EMISSION MODEL; FLUCTUATIONS; GOLD IONS; ION BEAMS; KEV RANGE; MASS SPECTRA; SPUTTERING; TANTALUM
- Descriptors DEC
- ALLOYS; BEAMS; CHARGED PARTICLES; ELEMENTS; ENERGY RANGE; IONS; MATHEMATICAL MODELS; METALS; MULTIPERIPHERAL MODEL; PARTICLE MODELS; PERIPHERAL MODELS; REFRACTORY METALS; SPECTRA; TRANSITION ELEMENTS; VARIATIONS
Optional Information
- Notes
- 13 refs., 3 figs.