Published 1992
| Version v1
Book
Studies of crystallinity for sputtering deposited Bi-based oxide films
Creators
- 1. Matsushita Electric Industrial Co. Ltd., Moriguchi, Osaka (Japan). Central Research Lab.
Description
This paper reports on crystalline quality of Bi-based oxide films evaluated by means of X-ray diffraction (XRD) and ion-channeling on the Rutherford backscattering (RBS). The films were sputter deposited 2201-phase Bi2Sr2CuP1O6-δ (BSCQ) and 2212-phase Bi2Sr2Ca1Cu2O8-δ (BSCCO). They were prepared on MgO (100) and SrTiO3 (100) substrates at the low temperature of 650 degrees C during the deposition. The best quality, however thin films had poor crystallinity compared to single crystals, was obtained with the 2201-phase BSCO film that was deposited on a SrTiO3 (100) substrate. The full width at half maximum (FWHM) value of the rocking curve on XRD for the film was estimated as 1560 (arc sec)
Additional details
Publishing Information
- Publisher
- Materials Research Society.
- Imprint Place
- Pittsburgh, PA (United States)
- ISBN
- 1-55899-170-0
- Imprint Title
- Proceedings of layered superconductors
- Imprint Pagination
- 929 p.
- Journal Page Range
- p. 901-906.
Conference
- Title
- 1992 Material Research Society (MRS) spring meeting.
- Dates
- 27 Apr - 2 May 1992.
- Place
- San Francisco, CA (United States).
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 24029277
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- BACKSCATTERING; BISMUTH COMPOUNDS; COMPARATIVE EVALUATIONS; CRYSTAL STRUCTURE; CUPRATES; FABRICATION; ION CHANNELING; MAGNESIUM OXIDES; MONOCRYSTALS; SPUTTERING; STRONTIUM OXIDES; SUBSTRATES; SUPERCONDUCTING FILMS; SUPERCONDUCTIVITY; TEMPERATURE RANGE 0400-1000 K; TITANATES; X-RAY DIFFRACTION
- Descriptors DEC
- ALKALINE EARTH METAL COMPOUNDS; CHALCOGENIDES; CHANNELING; COHERENT SCATTERING; COPPER COMPOUNDS; CRYSTALS; DIFFRACTION; ELECTRIC CONDUCTIVITY; ELECTRICAL PROPERTIES; EVALUATION; FILMS; MAGNESIUM COMPOUNDS; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; SCATTERING; STRONTIUM COMPOUNDS; TEMPERATURE RANGE; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS
Optional Information
- Secondary number(s)
- CONF-920402--.