Published 1976 | Version v1
Journal article Metadata-only

Glow discharge sputtering

Creators

  • 1. Bell-Northern Research and Development Labs., Ottawa, Ontario (Canada)

Description

The subject is treated under the following headings: introduction; glow discharge as ion sources; sputtered species and their transport to substrate; arrival at substrate (deposition rates and uniformity; substrate temperature; nucleation and growth; crystal phases; crystal orientation; stress; adhesion). The review covers 288 literature references. (U.K.)

Additional details

Identifiers

DOI
10.1016/0079-6816(76)90002-2;

Publishing Information

Journal Title
Progress in Surface Science
Journal Volume
7
Journal Issue
2
Series
Prog. Surf. Sci.
Journal Page Range
71-111
ISSN
0079-6816

INIS

Country of Publication
United Kingdom
Country of Input or Organization
United Kingdom
INIS RN
7245444
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
BIBLIOGRAPHIES; GLOW DISCHARGES; ION SOURCES; PHYSICAL RADIATION EFFECTS; REVIEWS; SPUTTERING
Descriptors DEC
DOCUMENT TYPES; ELECTRIC DISCHARGES; RADIATION EFFECTS

Optional Information

Notes
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