Published June 2008
| Version v1
Journal article
Improvement of uniformity of inductively coupled plasma with a cone spiral antenna
- 1. Fudan Univ., Shanghai (China). Inst. of Modern Physics
Description
Uniformity of inductively coupled plasma (ICP) is improved with a cone spiral antenna in our experiment. Performance of the ICP with a new type of antenna is experimentally investigated. The results indicate that the uniformity of plasma density in the radial direction is obviously improved as compared to the ICP with a planar spiral antenna. Performance of ICP is analysed with the experimental results. (authors)
Additional details
Publishing Information
- Journal Title
- Chinese Physics Letters
- Journal Volume
- 25
- Journal Issue
- 6
- Journal Page Range
- p. 2144-2146
- ISSN
- 0256-307X
INIS
- Country of Publication
- China
- Country of Input or Organization
- China
- INIS RN
- 40104731
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Descriptors DEI
- ANTENNAS; CONES; COUPLING; HOMOGENEOUS PLASMA; INDUCTION; MODIFICATIONS; PERFORMANCE; PLASMA DENSITY; PLASMA PRODUCTION; SPATIAL DISTRIBUTION; SPIRAL CONFIGURATION
- Descriptors DEC
- CONFIGURATION; DISTRIBUTION; ELECTRICAL EQUIPMENT; EQUIPMENT; PLASMA
Optional Information
- Notes
- 5 figs., 7 refs.