The application of the plasma chemical reaction in the r.f ion source

This paper introduced a cross science of the chemistry and the physics -- the technique of the plasma chemical reaction in applying the r.f. ion source. By this technique, the problem of drawing metal ions were solved. Especially, the problem of drawing the high volatilize temperature metal ions were solved. The ions drawn are: Re/sup +/, W/sup +/, Mo/sup +/, Pd/sup +/, Pt/sup +/, Ta/sup +/, Au/sup +/, Ag/sup +/, Ti/sup +/, Cr/sup +/, V+/sup +/, Fe/sup +/, Cu/sup +/, Si/sup +/, Al/sup +/, Mg/sup +/, Be/sup +/, Ga/sup +/, In/sup +/, Bi/sup +/, Li/sup +/, and the drawn ions of the rare earth element are: Y/sup +/, Ce/sup +/, Nd/sup +/ and so on. The technique has been used for five years in a 400Kev ion implenter in Beijing Normal University, good result has been obtained