Published January 1985 | Version v1
Journal article Metadata-only

Structure, composition and superconducting properties of ultrathin niobium films deposited under autoionic bombardment

Creators

Description

Ultrathin niobium films deposited under niobium ions bombardment have been investigated. It is ascertained that the sublayer is the main source of impurities under conditions of ion deposition. There is the range of optimum values of deposition parameters in which fine-grained textured ultrathin niobium layers are formed under conditions of industrial vacuum with high temperature of transition in the superconducting state

Additional details

Additional titles

Original title (Russian)
Структура, состав и сверхпроводящие свойства сверхтонких пленок ниобия, конденсированных в условиях автоионной бомбардировки

Publishing Information

Journal Title
Mikroehlektronika
Journal Volume
14
Journal Issue
1
Series
Mikroehlektronika.
Journal Page Range
45-49
CODEN
MKETA

INIS

Country of Publication
USSR
Country of Input or Organization
USSR
INIS RN
17015794
Subject category
S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE;
Descriptors DEI
GRAIN SIZE; IMPURITIES; NIOBIUM; NIOBIUM IONS; PHYSICAL RADIATION EFFECTS; SUPERCONDUCTIVITY; THICKNESS; THIN FILMS; TRANSITION TEMPERATURE; VAPOR DEPOSITED COATINGS
Descriptors DEC
ATOMIC IONS; CHARGED PARTICLES; COATINGS; CRYSTAL STRUCTURE; DIMENSIONS; ELECTRIC CONDUCTIVITY; ELECTRICAL PROPERTIES; ELEMENTS; FILMS; IONS; METALS; MICROSTRUCTURE; PHYSICAL PROPERTIES; RADIATION EFFECTS; SIZE; THERMODYNAMIC PROPERTIES; TRANSITION ELEMENTS