Low energy ion-assisted deposition of metal films
Creators
- 1. IBM Research Div., T.J. Watson Research Center, Yorktown Heights, NY (United States)
Description
A review is given of ion-beam-assisted (IBAD) metal film growth, focusing on ion beam techniques. Common experimental techniques including ion-beam-assisted evaporation and dual-ion-beam sputtering are described. Emphasis is placed on ion-bombardment-induced changes in film properties, including stress, resistivity, hardness, and magnetic properties. In addition, effects on film microstructure including grain size, texture, grain shape, and impurity incorporation are detailed. The themes emphasized in this review include (1) the complex relationship between changes in experimental deposition parameters and changes in film properties and microstructure, (2) current understanding of microstructure-property relations in ion-assisted films, and (3) important mechanisms for ion-assisted metal film growth. (orig.)
Additional details
Publishing Information
- Journal Title
- Surface and Coatings Technology
- Journal Volume
- 51
- Journal Issue
- 1-3
- Series
- Surf. Coat. Technol.
- Journal Page Range
- 203-211
- ISSN
- 0257-8972
- CODEN
- SCTEE
Conference
- Title
- 7. international conference on surface modification of metals by ion beams.
- Dates
- 14-19 Jul 1991.
- Place
- Washington, DC (United States).
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- Switzerland
- INIS RN
- 23085645
- Subject category
- S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ARGON IONS; DEPOSITION; ELECTRIC CONDUCTIVITY; ETCHING; EVAPORATION; FILMS; FOCUSING; GRAIN BOUNDARIES; GRAIN SIZE; IMPURITIES; ION BEAMS; METALS; MICROHARDNESS; MICROSTRUCTURE; REVIEWS; SPUTTERING; STRESSES; TEMPERATURE DEPENDENCE; TEXTURE; THIN FILMS; TUNGSTEN
- Descriptors DEC
- BEAMS; CHARGED PARTICLES; CRYSTAL STRUCTURE; DOCUMENT TYPES; ELECTRICAL PROPERTIES; ELEMENTS; HARDNESS; IONS; MECHANICAL PROPERTIES; PHASE TRANSFORMATIONS; PHYSICAL PROPERTIES; SIZE; TRANSITION ELEMENTS