Published 1984
| Version v1
Miscellaneous
Deposition and characterization of a-Si:H thin films obtained from RF Glow discharge of SiH4 and He mixture
- 1. Universidade Federal Fluminense, Niteroi (Brazil). Inst. de Fisica
Description
Preliminary results on deposition and characterization of hydrogenated amorphous silicon thin films are presented. These films were produced by the RF Glow Discharge procedure. The RF power applied and the He:SiH4 proportion were varied in the deposition chamber. The increasing rate, the absorption coefficient, the optical gap and the electrical conducivity as a function of temperature were studied. It was verified that inside the studied range, those properties are, with the exception of the increasing rate weakly dependent of the deposition conditions. (Author)
Abstract (Portuguese)
Apresentam-se resultados preliminares de deposicao e caracterizacao de filmes finos de silicio amorfo hidrogenado produzidos por descarga luminescente RF Variou-se a potencia RF aplicada e a proporcao He:Si H4 na camara de deposicao. Estudou-se a taxa de crescimento, coeficiente de absorcao, banda proibida otica e condutividade eletrica em funcao da temperatura. Verificou-se que dentro da faixa estudada, tais propriedades, com execao da taxa de crescimento, sao fracamente dependentes das condicoes de deposicao. (Autor)Additional details
Additional titles
- Original title (Portuguese)
- Deposicao e caracterizacao de filmes finos de a-Si:H obtidos por descarga luminescente RF de mistura de SiH
Publishing Information
- Imprint Title
- Proceedings of the Latin American Symposium of Physics of Amorphous Systems- v.2
- Imprint Pagination
- 265 p.
- Journal Page Range
- p. 492-495.
- Report number
- INIS-BR--903
Conference
- Title
- Latin American Symposium of Physics of Amorphous Systems.
- Dates
- 27 Feb - 2 Mar 1984.
- Place
- Niteroi, RJ (Brazil).
INIS
- Country of Publication
- Brazil
- Country of Input or Organization
- Brazil
- INIS RN
- 18096365
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ELECTRIC CONDUCTIVITY; FABRICATION; GLOW DISCHARGES; HYDROGEN ADDITIONS; SILICON; TEMPERATURE DEPENDENCE; THIN FILMS
- Descriptors DEC
- ELECTRIC DISCHARGES; ELECTRICAL PROPERTIES; ELEMENTS; FILMS; PHYSICAL PROPERTIES; SEMIMETALS
Optional Information
- Notes
- Imprint:Anais do Simposio Latino-Americano de Fisica dos Sistemas Amorfos - v.2.