Design of new compact ECR ion source for production of various ions

Compact ECR ion source with all permanent magnets, so called Kei2, was developed for high energy carbon ion therapy facility at National Institute of Radiological Sciences. Kei2 source was design for production of only carbon ion for medical treatment. A copy of Kei2, so called KeiGM is used for Gunma University. Kei series are optimized for carbon ion production. In order to produce various ion beams for research, we design a new compact ECR ion source, so called Kei3. Kei3 is designed based on previous Kei series. In addition, there are three important points: movable beam extraction system for various extraction current densities; an evaporator and MIVOC method for production of ions from solid materials and metal; and biased disk method and double frequency heating method for heavier ions. Same permanent magnets and microwave system will be used for easy maintenance and the cost effectiveness. Design of the Kei3 source will be described in this paper.