Radiation damage effects in ion-implanted Bi-Sr-Ca-Cu-O superconducting thin films

Transition temperature (T/sub c/) control and annealing effects of Bi/sub 2.0/Sr/sub 1.4/Ca/sub 1.8/Cu/sub 2.2/O/sub y/ superconducting thin films implanted by 200 keV Ne+ have been investigated. T/sub c/ end points for 0.4-μm-thick Bi/sub 2.0/Sr/sub 1.4/Ca/sub 1.8/Cu/sub 2.2/O/sub y/ films for 0, 1 x 1012, and 1 x 1013 ions/cm2 doses are 78, 76, and 54 K, respectively. The ion dose, to achieve a nonsuperconductor for Bi/sub 2.0/Sr/sub 1.4/Ca/sub 1.8/Cu/sub 2.2/O/sub y/ films, is two or more orders of magnitude lower than that for YBa2Cu3O/sub 7-//sub x/ films. The c-lattice constant increases were observed for the implanted films. Moreover, it was confirmed that the superconducting characteristics for the implanted films are recovered by annealing in O2 atmosphere