Electronegative magnetized plasma sheath properties in the presence of non-Maxwellian electrons with a homogeneous ion source

The three-fluid model was employed to study electronegative magnetized plasma sheath properties in the presence of non-Maxwellian electrons. The Bohm condition for the electronegative magnetized plasma was extended in the presence of a homogeneous ionization source term and an ion-neutral collision force. The effect of the following physical parameters: the degree of non-Maxwellian electrons, ion-neutral collisions, obliqueness of the magnetic field and source frequency on the plasma sheath parameters are numerically analyzed and presented. It was found that the magnitude of the potential increased in all cases and hence the velocity of the ions increased towards the wall. The plasma sheath parameters were not significantly varied about 2λ _De from the presheath—sheath interface, but after that, the sheath parameters abruptly changed towards the wall. The effect of ion-neutral collisions and the obliqueness of the magnetic field on the potential distribution, net charge density and drift velocity of ions are discussed. Furthermore, a comparison of plasma sheath characteristics with and without the ion source term is systematically presented. (paper)