Published June 1999 | Version v1
Journal article

Development of an electron cyclotron resonance ion source and its application

  • 1. Open Laboratory for Radiation Physics and technology of Education Ministry, Institute of Nuclear Science and Technology, Sichuan Univ., Chengdu (China)

Description

The design, construction and characteristics of an electron cyclotron resonance (ECR) ion source are emphatically introduced. An optimized triple layer window (quartz, alumina and BN) was found to be very effective in order to achieving a long lifetime, high-density plasma as well as high quantity introducing microwave. The axial magnetic field to satisfy the ECR condition (87.5 mT) and to provide plasma confinement was produced by two solenoid coils with iron yokes. Three C:N films were prepared by decomposing CH4-NH3 in this source. After the films were annealed in vacuum, two of them were rent in C:N cluster fiber with different diameters

Additional details

Publishing Information

Journal Title
Nuclear Techniques
Journal Volume
22
Journal Issue
6
Journal Page Range
p. 343-347
ISSN
0253-3219