Published 2013 | Version v1
Book Metadata-only

Investigation of energetic characteristics of HF-discharge plasma ions in modern units RIE (Reactive Ion Etching)

Creators

  • 1. Natsional'nyj Issledovatel'skij Yadernyj Univ. MIFI, Moscow (Russian Federation)

Description

no abstract available

Part of:
Scientific session of NRNU MEPHI-2013. Abstracts. In three volumes. Volume 2. Problems of fundamental science. Strategic information technologies

Additional details

Additional titles

Original title (Russian)
Исследование энергетических характеристик ионов плазмы VCh-разряда в современных установках RIT (реактивного ионного травления)

Publishing Information

Publisher
NIYaU MIFI
Imprint Place
Moscow (Russian Federation)
ISBN
978-5-7262-1787-1
Imprint Title
Scientific session of NRNU MEPHI-2013. Abstracts. In three volumes. Volume 2. Problems of fundamental science. Strategic information technologies
Imprint Pagination
364 p.
Journal Page Range
p. 188

Conference

Title
Scientific session of NRNU MEPHI-2013
Original Conference Title
Nauchnaya sessiya NIYaU MIFI-2013
Dates
2013
Place
Moscow (Russian Federation)

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
46040080
Subject category
S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
Resource subtype / Literary indicator
No Abstract, Conference
Descriptors DEI
ETCHING; ION BEAMS; MORPHOLOGY; PLASMA; REACTION KINETICS; SHORT WAVE RADIATION; SURFACES
Descriptors DEC
BEAMS; ELECTROMAGNETIC RADIATION; KINETICS; RADIATIONS; RADIOWAVE RADIATION; SURFACE FINISHING

Optional Information

Notes
Imprint:Nauchnaya sessiya NIYaU MIFI-2013. Annotatsii dokladov. V 3-kh tomakh. Tom 2. Problemy fundamental'noj nauki. Strategicheskie informatsionnye tekhnologii