Mechanism of laser drilling superhigh-aspect-ratio holes in polymers
Creators
- 1. Natural Science Center, A.M. Prokhorov General Physics Institute, Russian Academy of Sciences, Moscow (Russian Federation)
Description
A brief review of recent theoretical and experimental studies of multipulse laser drilling keyholes in polymers is presented. The stationary keyhole profile is obtained after irradiation by a quite great number of laser pulses due to self-organisation processes and is a new more stable state of the surface irradiated by intense light. This concept together with ample experimental data obtained for various polymers form the basis of the analytical model of multipulse drilling holes with a superhigh depth - diameter ratio (300-600) (the so-called aspect ratio) by using UV excimer KrF laser radiation. The model reveals the main factors controlling the parameters of drilling holes by nanosecond UV pulses and, in particular, determines the conditions for drilling holes with virtually parallel side walls and very high aspect ratios. (special issue devoted to the 90th anniversary of a.m. prokhorov)
Availability note (English)
Available from http://dx.doi.org/10.1070/QE2006v036n07ABEH013181Additional details
Identifiers
Publishing Information
- Journal Title
- Quantum Electronics (Woodbury, N.Y.)
- Journal Volume
- 36
- Journal Issue
- 7
- Journal Page Range
- p. 624-637
- ISSN
- 1063-7818
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 42060224
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Numerical Data
- Descriptors DEI
- ASPECT RATIO; DEPTH; DRILLING; EXPERIMENTAL DATA; HOLES; KRYPTON FLUORIDE LASERS; LASER DRILLING; PHYSICAL RADIATION EFFECTS; POLYMERS; PULSES; SPATIAL DISTRIBUTION; VISIBLE RADIATION
- Descriptors DEC
- DATA; DIMENSIONLESS NUMBERS; DIMENSIONS; DISTRIBUTION; ELECTROMAGNETIC RADIATION; EXCIMER LASERS; GAS LASERS; INFORMATION; LASERS; MACHINING; MATERIALS DRILLING; NUMERICAL DATA; RADIATION EFFECTS; RADIATIONS