Focused Ion Beam Technology as Preparation Supporting Tool of the Future Transmission Microscope

Focused ion beam technology (FIB) is an important development for microstructure preparation of transmission electron microscope. The capability to focus a beam of ions to sub micrometer dimensions can be used automatically as cutting tools of sample until 100 nm. Cutting process started with a dimension of 0.5 x 1.5 mm in the thick of 0.02 mm to the transparent condition that can be analyzed in the TEM. This sample can be characterized directly by TEM with optimal results to answer micro and nanno structure phenomena for high temperature oxidation processes. This paper shows a new cross section preparation techniques with FIB and reviews the directions and conditions of development of the FIB used in the high temperature oxidation processes with an examples FeCrAI alloys by temperature of 1200 oC in different oxidation time of 2, 10 minutes and 100 h. With the conventional preparation combination of the 1000 h, detailed insight into the scale growth mechanisms were obtained. (author)