Published October 21, 2011 | Version v1
Journal article

SEM-induced shrinking of solid-state nanopores for single molecule detection

  • 1. School of Biomedical Engineering and Health Science, Drexel University, Philadelphia, PA 19104 (United States)
  • 2. Department of Chemical and Biological Engineering, Drexel University, Philadelphia, PA 19104 (United States)
  • 3. Physical Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899-8120 (United States)
  • 4. Centralized Research Facilities, Drexel University, Philadelphia, PA 19104 (United States)

Description

We have investigated the mechanism by which the diameter of solid-state nanopores is reduced by a scanning electron microscope. The process depends on beam parameters such as the accelerating voltage and electron flux and does not involve simple electron-beam-induced deposition of hydrocarbon contaminants. Instead, it is an energy-dependent process that involves material flow along the surface of the nanopore membrane. We also show that pores fabricated in this manner can detect double stranded DNA.

Availability note (English)

Available from http://dx.doi.org/10.1088/0957-4484/22/42/425302

Additional details

Identifiers

DOI
10.1088/0957-4484/22/42/425302;
PII
S0957-4484(11)81047-0;

Publishing Information

Journal Title
Nanotechnology (Print)
Journal Volume
22
Journal Issue
42
Journal Page Range
[10 p.]
ISSN
0957-4484

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
43026376
Subject category
S77: NANOSCIENCE AND NANOTECHNOLOGY;
Descriptors DEI
DEPOSITION; DETECTION; DNA; ELECTRON BEAMS; ELECTRONS; ENERGY DEPENDENCE; HYDROCARBONS; MEMBRANES; MOLECULES; NANOSTRUCTURES; SCANNING ELECTRON MICROSCOPY; SOLIDS; SURFACES
Descriptors DEC
BEAMS; ELECTRON MICROSCOPY; ELEMENTARY PARTICLES; FERMIONS; LEPTON BEAMS; LEPTONS; MICROSCOPY; NUCLEIC ACIDS; ORGANIC COMPOUNDS; PARTICLE BEAMS