Published November 1990
| Version v1
Journal article
Some features of mixing of Cu and Mo by argon ions with 40 keV energy
Description
The research of ion mixing of two metals (Cu and Mo) that are insoluble in equilibrium conditions has been carried out with the SIMS method. The experimental data have been obtained with tearing off test show the possibilities of improving the adhesion properties of copper coatings deposited on a Mo substrate after the mixing by argon ions
Additional details
Additional titles
- Original title (Russian)
- Особенности перемешивания слоя меди на молибдене при воздействии ионов аргона с энергией 40 кэв
Publishing Information
- Journal Title
- Fizika i Khimiya Obrabotki Materialov
- Journal Issue
- no.6
- Series
- Fiz. Khim. Obrab. Mater.
- ISSN
- 0015-3214
- CODEN
- FKOMA
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- USSR
- INIS RN
- 22071902
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- ADHESION; ARGON IONS; COPPER; ION IMPLANTATION; KEV RANGE 10-100; MIXING; MOLYBDENUM; PHYSICAL RADIATION EFFECTS; SUBSTRATES; VAPOR DEPOSITED COATINGS
- Descriptors DEC
- CHARGED PARTICLES; COATINGS; ELEMENTS; ENERGY RANGE; IONS; KEV RANGE; METALS; RADIATION EFFECTS; TRANSITION ELEMENTS