Modification of nitride coating under ion bombardment

A model of nitride coating treatment by a combined beam of aluminum and boron ions is presented. Results of numerical investigation of the model are mechanical stresses in the work area, phase and chemical composition of the coating at an arbitrary instant of time and toward the end of the treatment process for varying technological parameters. On the basis of a notion of generalized plane stress-strain state it is shown that explicit differentiation between diffusion and thermal stresses is possible in individual cases only. In the simplest case the problem is reduced to described in the literature stress problem of a plate characterizing by thickness graded properties. Results of numerical investigation are in qualitative and quantitative agreement with the experimental data. Key words: mathematical simulation, phase and chemical composition, diffusion zone, thermal and diffusion stresses