Published September 9, 2005
| Version v1
Journal article
Particle Size Metrology: Comparison Between Aerosol Electrical Mobility and Laser Surface Light Scattering Techniques
Creators
- 1. National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, MD 20899 (United States)
Description
Two different methods used to determine the size of polystyrene spheres were found to disagree by about 5 %. One of the methods, differential mobility analysis, measures particles in the aerosol phase, while the other, laser surface light scattering, measures them bound to a surface. It is believed that the observed discrepancy results from deformation of the particle when it is bound to the surface. The implications of such a deformation on scanning surface inspection system calibration is discussed
Additional details
Identifiers
- DOI
- 10.1063/1.2063021;
Publishing Information
- Journal Title
- AIP Conference Proceedings
- Journal Volume
- 788
- Journal Issue
- 1
- Journal Page Range
- p. 579-583
- ISSN
- 0094-243X
- CODEN
- APCPCS
Conference
- Title
- 2005 international conference on characterization and metrology for ULSI technology
- Dates
- 15-18 Mar 2005
- Place
- Richardson, TX (United States)
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 37031537
- Subject category
- S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- AEROSOLS; CALIBRATION; DEFORMATION; LASERS; LIGHT SCATTERING; MEASURING METHODS; MOBILITY; PARTICLE SIZE; PARTICLES; POLYSTYRENE; SPHERES
- Descriptors DEC
- COLLOIDS; DISPERSIONS; MATERIALS; ORGANIC COMPOUNDS; ORGANIC POLYMERS; PETROCHEMICALS; PETROLEUM PRODUCTS; PLASTICS; POLYMERS; POLYOLEFINS; POLYVINYLS; SCATTERING; SIZE; SOLS; SYNTHETIC MATERIALS
Optional Information
- Notes
- (c) 2005 American Institute of Physics