Published 2013 | Version v1
Book Metadata-only

Analysis of possible sources of errors during linear dimension measuring in nanometer range

Creators

  • 1. Natsional'nyj Issledovatel'skij Yadernyj Univ. MIFI, Moscow (Russian Federation)

Description

no abstract available

Part of:
Scientific session of NRNU MEPHI-2013. Abstracts. In three volumes. Volume 2. Problems of fundamental science. Strategic information technologies

Additional details

Additional titles

Original title (Russian)
Анализ возможных источников ошибок, возникающих при измерениях линейных размеров в нанометровом диапазоне

Publishing Information

Publisher
NIYaU MIFI
Imprint Place
Moscow (Russian Federation)
ISBN
978-5-7262-1787-1
Imprint Title
Scientific session of NRNU MEPHI-2013. Abstracts. In three volumes. Volume 2. Problems of fundamental science. Strategic information technologies
Imprint Pagination
364 p.
Journal Page Range
p. 159

Conference

Title
Scientific session of NRNU MEPHI-2013
Original Conference Title
Nauchnaya sessiya NIYaU MIFI-2013
Dates
2013
Place
Moscow (Russian Federation)

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
46040035
Subject category
S77: NANOSCIENCE AND NANOTECHNOLOGY;
Resource subtype / Literary indicator
No Abstract, Conference
Descriptors DEI
ACCURACY; ERRORS; INTERFEROMETERS; MICROSCOPES; NANOSTRUCTURES; SCANNING ELECTRON MICROSCOPY
Descriptors DEC
ELECTRON MICROSCOPY; MEASURING INSTRUMENTS; MICROSCOPY

Optional Information

Notes
Imprint:Nauchnaya sessiya NIYaU MIFI-2013. Annotatsii dokladov. V 3-kh tomakh. Tom 2. Problemy fundamental'noj nauki. Strategicheskie informatsionnye tekhnologii