Miniature and micro mass spectrometry for nanoscale sensing applications

In recent years the use of miniature and/or microscale versions of the more popular mass spectrometers have been realised. This has led to the development of portable analytical devices for a range of 'in the field' sensing applications in aerospace, environmental monitoring, medical diagnosis and process control. In this paper the principles underpinning the development of miniature quadrupole mass spectrometers are reviewed. Two different microfabrication methods are compared with a conventional QMS used for residual gas analysis in the range 1-100 Da.