Published 1977 | Version v1
Miscellaneous Metadata-only

Comparison between electron beam evaporation and high-rate sputtering with the plasmatron

Creators

  • 1. Forschungsinstitut Manfred von Ardenne, Dresden (German Democratic Republic)

Description

It is the objective of this paper to derive criteria from a comparison between EB evaporation and high-rate sputtering to allow the selection of the most suitable method for a given application. (author)

Additional details

Publishing Information

Imprint Title
IPAT 77 proceedings. Conference on ion plating and allied techniques
Journal Page Range
p. 157-168.

Conference

Title
Conference on ion plating and allied techniques (IPAT 77).
Dates
Jun 1977.
Place
Edinburgh (UK).

INIS

Country of Publication
United Kingdom
Country of Input or Organization
United Kingdom
INIS RN
9377283
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference, Non-conventional Literature
Descriptors DEI
COMPARATIVE EVALUATIONS; ELECTRON BEAMS; EVAPORATION; PLASMATRONS; SPUTTERING; VAPOR DEPOSITED COATINGS; VAPOR PLATING
Descriptors DEC
BEAMS; COATINGS; DEPOSITION; ELECTRON TUBES; LEPTON BEAMS; PARTICLE BEAMS; PHASE TRANSFORMATIONS; PLATING; SURFACE COATING