Published June 2010
| Version v1
Journal article
Influence of the preparation temperature on the SAW velocity of partially oxidized Fe thin films
- 1. Instituto de Ciencia de Materiales de Madrid (ICMM), Consejo Superior de Investigaciones Cientificas (CSIC), 28049, Cantoblanco, Madrid (Spain)
- 2. Centro Microanalisis de Materiales (CMAM), 28049, Cantoblanco, Madrid (Spain)
Description
The influence of the preparation temperature on the surface acoustic wave (SAW) propagation velocity of iron thin films deposited by DC magnetron sputtering has been studied by High Resolution Brillouin Spectroscopy (HRBS). A clear different elastic behaviour has been found for sample grown at 200 K substrate temperature. Numerical simulation has been used to reproduce experimental elastic data and it is possible to relate the difference in elastic response in different samples to the existence of a FeO layer among other oxides. This effect is discussed in relation with the iron oxidation type that also affects the magnetic properties of iron thin films on silicon substrates.
Availability note (English)
Available from http://dx.doi.org/10.1088/1757-899X/12/1/012014Additional details
Identifiers
Publishing Information
- Journal Title
- IOP Conference Series. Materials Science and Engineering (Online)
- Journal Volume
- 12
- Journal Issue
- 1
- Journal Page Range
- [4 p.]
- ISSN
- 1757-899X
Conference
- Title
- International conference on innovations in thin film processing and characterisation
- Acronym
- ITFPC 2009
- Dates
- 17-20 Nov 2009
- Place
- Nancy (France)
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 43019286
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- COMPUTERIZED SIMULATION; IRON; IRON OXIDES; LAYERS; MAGNETIC PROPERTIES; MAGNETRONS; SILICON; SPUTTERING; SUBSTRATES; THIN FILMS
- Descriptors DEC
- CHALCOGENIDES; ELECTRON TUBES; ELECTRONIC EQUIPMENT; ELEMENTS; EQUIPMENT; FILMS; IRON COMPOUNDS; METALS; MICROWAVE EQUIPMENT; MICROWAVE TUBES; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; SEMIMETALS; SIMULATION; TRANSITION ELEMENT COMPOUNDS; TRANSITION ELEMENTS