Diamond formation in cubic silicon carbide

High-dose carbon implantation (3x1017 and 1x1018 ions/cm2) into cubic SiC on Si was carried out at elevated temperatures (600 to 1200 deg. C) and different dose rates (1x1013 to 1.5x1014 cm-2 s-1). Transmission electron microscopy revealed the formation of either graphite or diamond precipitates, depending on the implantation parameters. In all cases, the diamond grains were epitaxial to the SiC lattice, while the graphite was textured. The minimum temperature for diamond formation was 900 deg. C, while graphite formed at 600 deg. C. The synthesized phase depends as well on the dose rate; graphite was formed at 900 deg. C with a high dose rate. Obviously, a critical temperature for diamond formation exists and increases with increasing dose rate. This behavior is explained by the competition between the accumulation and dynamic annealing of radiation defects in the SiC lattice, which acts as a template for diamond nucleation. Diamond grains with diameters as large as 10 nm have been observed after implantation at 1200 deg. C