Published October 12, 2015
| Version v1
Journal article
Exploring backscattered imaging in low voltage FE-SEM
- 1. School of Chemical and Process Engineering, University of Leeds, Leeds LS2 9JT (United Kingdom)
- 2. Hitachi High-Technologies Europe, Maidenhead SL6 8YA (United Kingdom)
Description
Contrast levels in backscattered SEM images were investigated, utilising stage deceleration for low voltage imaging and also electron energy filtering. Image contrast variations are explained via use of Monte Carlo simulations which can predict the optimum accelerating and filter voltages for imaging complex sample mixtures. (paper)
Availability note (English)
Available from http://dx.doi.org/10.1088/1742-6596/644/1/012019Additional details
Identifiers
Publishing Information
- Journal Title
- Journal of Physics. Conference Series (Online)
- Journal Volume
- 644
- Journal Issue
- 1
- Journal Page Range
- [4 p.]
- ISSN
- 1742-6596
Conference
- Title
- Electron Microscopy and Analysis Group conference
- Acronym
- EMAG2015
- Dates
- 29 Jun - 2 Jul 2015
- Place
- Manchester (United Kingdom)
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 47108104
- Subject category
- S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ACCELERATION; BACKSCATTERING; COMPUTERIZED SIMULATION; ELECTRIC POTENTIAL; ELECTRONS; IMAGES; MIXTURES; MONTE CARLO METHOD; SCANNING ELECTRON MICROSCOPY; VARIATIONS
- Descriptors DEC
- CALCULATION METHODS; DISPERSIONS; ELECTRON MICROSCOPY; ELEMENTARY PARTICLES; FERMIONS; LEPTONS; MICROSCOPY; SCATTERING; SIMULATION