Development of a 100 MHz RF ion source test stand at KOMAC

Korea Multi-purpose Accelerator Complex (KOMAC) has several ion accelerators to provide various ion beams to users. A test stand of ion source is being developed to satisfy the needs from the users for the applications with kV range ion beam implantation. A 100 MHz RF ion source has being installed and tested with bias voltages to check its characteristics. The ions are basically extracted by the potential differences in the entire system. Therefore, ion beam extraction conditions are affected by probe, deck and focus bias voltage. We check the bias effects for extracting ions