Published May 2008
| Version v1
Journal article
Preparation of manostructured Ta-B-N films
Creators
- 1. Donbasskaya Gosudarstvennaya Mashinostroitel'naya Akademiya, Kramatorsk (Ukraine)
- 2. Donetskij Natsional'nyj Univ., Donetsk (Ukraine)
Description
The nitrogen/argon ratio in the gas mixture is studied for its effect on the growth of films via reactive rf magnetron sputtering of a TaB2 target in Ar + N2 and on the electrical and mechanical properties of the nanostructured films produced at different nitrogen contents in the Ta-B-N system. The results demonstrate that even small nitrogen additions prevent preferential orientation and columnar growth. No ternary compounds are formed during reactive rf magnetron sputtering of a TaB2 target in Ar + N2
Abstract (Russian)
Исследовано влияние соотношения азота и аргона на процесс формирования пленок, полученных реактивным ВЧ-магнетронным распылением мишени ТаВ2 в среде Ar + N2. Изучены электрические и физико-механические свойства наноструктурных пленок, полученных при различном содержании азота в системе Та-B-N. Показано, что незначительное добавление азота в состав рабочего газа приводит к полному исчезновению текстуры и столбчатой структуры. При реактивном ВЧ-магнетронном распылении мишени ТаВ2 в среде Ar + N2 отсутствуют тройные соединенияAdditional details
Additional titles
- Original title (Russian)
- Получение наноструктурных пленок в системе Та-Б-Н
Publishing Information
- Journal Title
- Neorganicheskie Materialy
- Journal Volume
- 44
- Journal Issue
- 5
- Journal Page Range
- p. 575-579
- ISSN
- 0002-337X
- CODEN
- NEOMB8
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 39119828
- Subject category
- S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY; S36: MATERIALS SCIENCE;
- Descriptors DEI
- ARGON; CONCENTRATION RATIO; ELECTRIC CONDUCTIVITY; FILMS; MICROHARDNESS; NANOSTRUCTURES; NITROGEN; PHASE STUDIES; TANTALUM BORIDES; THICKNESS; VACUUM COATING; X-RAY DIFFRACTION
- Descriptors DEC
- BORIDES; BORON COMPOUNDS; COHERENT SCATTERING; DEPOSITION; DIFFRACTION; DIMENSIONLESS NUMBERS; DIMENSIONS; ELECTRICAL PROPERTIES; ELEMENTS; FLUIDS; GASES; HARDNESS; MECHANICAL PROPERTIES; NONMETALS; PHYSICAL PROPERTIES; RARE GASES; REFRACTORY METAL COMPOUNDS; SCATTERING; SURFACE COATING; TANTALUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS
Optional Information
- Notes
- 22 refs., 3 figs., 2 tabs.