Published April 1992
| Version v1
Journal article
Light emission from sputtered atoms following ion bombardment of polycrystalline metal targets
Description
Atomic line emission resulting from sputtered atoms and ions was investigated for 50-350 keV ion (Ne+, Ar+, Kr+, Xe+) bombardment of polycrystalline aluminum and copper targets. The measured energy and angular dependences are compared to theoretical predictions for the sputtering yield. (orig.)
Additional details
Publishing Information
- Journal Title
- Nuclear Instruments and Methods in Physics Research. Section B
- Journal Volume
- 67
- Journal Issue
- 1-4
- Series
- Nucl. Instrum. Methods Phys. Res., Sect. B.
- Journal Page Range
- 620-623
- ISSN
- 0168-583X
- CODEN
- NIMBE
Conference
- Title
- 14. international conference on atomic collisions in solids.
- Dates
- 28 Jul - 2 Aug 1991.
- Place
- Salford (United Kingdom).
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- Netherlands
- INIS RN
- 23073820
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ALUMINIUM; ARGON IONS; COPPER; ION BEAMS; KEV RANGE 10-100; KEV RANGE 100-1000; KRYPTON IONS; METALS; NEON IONS; PHOTON EMISSION; POLYCRYSTALS; SPUTTERING; XENON IONS
- Descriptors DEC
- BEAMS; CHARGED PARTICLES; CRYSTALS; ELEMENTS; EMISSION; ENERGY RANGE; IONS; KEV RANGE; TRANSITION ELEMENTS