Published December 1978 | Version v1
Journal article

The stability of equilibrium surface topography developed by sputtering

  • 1. Salford Univ. (UK)

Description

Previous publications have considered the development of topography upon isotropic, homogeneous solids resulting from the variation of erosion rate induced by energetic ion sputtering as a function of the angle of incidence of the ion flux. It has been shown that a steady state topography will develop after high fluence irradiation in certain circumstances, but except in the case of computational simulation the relative stability of the end forms has not been distinguished. In the present communication the stability criteria are explored. (U.K.)

Additional details

Publishing Information

Journal Title
J. Mater. Sci.
Journal Volume
13
Journal Issue
12
Series
J. Mater. Sci.
Journal Page Range
2725-2728
ISSN
0022-2461

INIS

Country of Publication
United Kingdom
Country of Input or Organization
United Kingdom
INIS RN
10446584
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
ANGULAR DISTRIBUTION; CONFIGURATION; EQUILIBRIUM; ION BEAMS; MATHEMATICAL MODELS; SOLIDS; SPUTTERING; STABILITY; SURFACE PROPERTIES
Descriptors DEC
BEAMS; DISTRIBUTION