Published October 2007
| Version v1
Journal article
Growth properties of poly(tetrafluoroethylene) films by synchrotron radiation ablation
Creators
- 1. Saga Univ., Dept. of Electrical and Electronic Engineering, Saga (Japan)
Description
High-quality poly(tetrafluoroethylene) (PTFE) films have been grown on Si substrates by synchrotron radiation ablation of a PTFE target. Only doublet absorption structures assigned to C-F asymmetric and symmetric stretching vibrations in CF2 groups are observed, suggesting that the CF2 groups in the grown PTFE film are organized in an ordered manner through linear attachment. The growth rate of the PTFE films increases with increasing target temperature, while it decreases with increasing substrate temperature. It has been shown that the thickness of the PTFE film with a high-spatial-resolution structure can be easily controlled at nanometer order by changing the synchrotron radiation irradiation dose. (author)
Additional details
Publishing Information
- Journal Title
- Japanese Journal of Applied Physics. Part 1, Regular Papers, Brief Communications and Review Papers
- Journal Volume
- 46
- Journal Issue
- 10A
- Journal Page Range
- p. 6782-6785
- ISSN
- 0021-4922
INIS
- Country of Publication
- Japan
- Country of Input or Organization
- Japan
- INIS RN
- 39035365
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- ABLATION; CARBON FLUORIDES; GROWTH; INFRARED SPECTRA; POLYTETRAFLUOROETHYLENE; RADIATION DOSES; SCANNING ELECTRON MICROSCOPY; SILICON; SUBSTRATES; SYNCHROTRON RADIATION; TEMPERATURE DEPENDENCE; THICKNESS; THIN FILMS; X-RAY SPECTROSCOPY
- Descriptors DEC
- BREMSSTRAHLUNG; CARBON COMPOUNDS; DIMENSIONS; DOSES; ELECTROMAGNETIC RADIATION; ELECTRON MICROSCOPY; ELEMENTS; FILMS; FLUORIDES; FLUORINATED ALIPHATIC HYDROCARBONS; FLUORINE COMPOUNDS; HALIDES; HALOGEN COMPOUNDS; HALOGENATED ALIPHATIC HYDROCARBONS; MICROSCOPY; ORGANIC COMPOUNDS; ORGANIC FLUORINE COMPOUNDS; ORGANIC HALOGEN COMPOUNDS; ORGANIC POLYMERS; POLYETHYLENES; POLYMERS; POLYOLEFINS; RADIATIONS; SEMIMETALS; SPECTRA; SPECTROSCOPY
Optional Information
- Notes
- 13 refs., 7 figs.