Published September 6, 2013 | Version v1
Journal article

Graphene interconnects fully encapsulated in layered insulator hexagonal boron nitride

  • 1. College of Nanoscale Science and Engineering, State University of New York, Albany, NY 12203 (United States)
  • 2. Institute of Microelectronics and Optoelectronics, Zhejiang University, Hangzhou, 310027 (China)

Description

We demonstrate improvements in the electrical performance of graphene interconnects with full encapsulation by lattice-matching layered insulator, hexagonal boron nitride (h-BN). A novel layer-based transfer method is developed to assemble the top passivating layer of h-BN on the graphene surface to construct the h-BN/graphene/h-BN heterostructures. The encapsulated graphene interconnects (EGIs) are characterized and compared with graphene interconnects on either SiO2 or h-BN substrates with no top passivating h-BN layer. We observe significant improvements in both the maximum current density and breakdown voltage in EGIs. Compared with the uncovered structures, EGIs also show an appreciable increase (∼67%) in power density at breakdown. These improvements are achieved without degrading the carrier transport characteristics in graphene wires. In addition, EGIs exhibit a minimal environment impact, showing electrical behavior insensitive to ambient conditions. (paper)

Availability note (English)

Available from http://dx.doi.org/10.1088/0957-4484/24/35/355202

Additional details

Publishing Information

Journal Title
Nanotechnology (Print)
Journal Volume
24
Journal Issue
35
Journal Page Range
[5 p.]
ISSN
0957-4484

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
44083921
Subject category
S77: NANOSCIENCE AND NANOTECHNOLOGY;
Descriptors DEI
BORON NITRIDES; BREAKDOWN; CARRIERS; CURRENT DENSITY; ENCAPSULATION; GRAPHENE; LAYERS; PERFORMANCE; POWER DENSITY; SILICON OXIDES; SURFACES
Descriptors DEC
BORON COMPOUNDS; CARBON; CHALCOGENIDES; ELEMENTS; NITRIDES; NITROGEN COMPOUNDS; NONMETALS; OXIDES; OXYGEN COMPOUNDS; PNICTIDES; SILICON COMPOUNDS