Graphene interconnects fully encapsulated in layered insulator hexagonal boron nitride
- 1. College of Nanoscale Science and Engineering, State University of New York, Albany, NY 12203 (United States)
- 2. Institute of Microelectronics and Optoelectronics, Zhejiang University, Hangzhou, 310027 (China)
Description
We demonstrate improvements in the electrical performance of graphene interconnects with full encapsulation by lattice-matching layered insulator, hexagonal boron nitride (h-BN). A novel layer-based transfer method is developed to assemble the top passivating layer of h-BN on the graphene surface to construct the h-BN/graphene/h-BN heterostructures. The encapsulated graphene interconnects (EGIs) are characterized and compared with graphene interconnects on either SiO2 or h-BN substrates with no top passivating h-BN layer. We observe significant improvements in both the maximum current density and breakdown voltage in EGIs. Compared with the uncovered structures, EGIs also show an appreciable increase (∼67%) in power density at breakdown. These improvements are achieved without degrading the carrier transport characteristics in graphene wires. In addition, EGIs exhibit a minimal environment impact, showing electrical behavior insensitive to ambient conditions. (paper)
Availability note (English)
Available from http://dx.doi.org/10.1088/0957-4484/24/35/355202Additional details
Identifiers
Publishing Information
- Journal Title
- Nanotechnology (Print)
- Journal Volume
- 24
- Journal Issue
- 35
- Journal Page Range
- [5 p.]
- ISSN
- 0957-4484
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 44083921
- Subject category
- S77: NANOSCIENCE AND NANOTECHNOLOGY;
- Descriptors DEI
- BORON NITRIDES; BREAKDOWN; CARRIERS; CURRENT DENSITY; ENCAPSULATION; GRAPHENE; LAYERS; PERFORMANCE; POWER DENSITY; SILICON OXIDES; SURFACES
- Descriptors DEC
- BORON COMPOUNDS; CARBON; CHALCOGENIDES; ELEMENTS; NITRIDES; NITROGEN COMPOUNDS; NONMETALS; OXIDES; OXYGEN COMPOUNDS; PNICTIDES; SILICON COMPOUNDS