Published 1977 | Version v1
Journal article Metadata-only

Analysis of thin oxid films using Auger electron spectroscopy

Creators

  • 1. Ecole Polytechnique Federale, Lausanne (Switzerland). Dept. des Materiaux

Description

no abstract available

Additional details

Additional titles

Original title (German)
Analyse duenner Oxydfilme mit Hilfe der Auger-Elektronenspektroskopie (AES)

Publishing Information

Journal Title
Verh. Dtsch. Phys. Ges.
Journal Issue
no. 1
Series
Verh. Dtsch. Phys. Ges.

Conference

Title
Spring meeting of the Arbeitskreis Festkoerperphysik at the Deutsche Physikalische Gesellschaft e.V. in conjunction with the Nederlandse Natuurkundige Vereninging and 2. symposium on solid state device technology.
Dates
7 - 12 Mar 1977.
Place
Muenster, Germany, F.R.

INIS

Country of Publication
Germany
Country of Input or Organization
Germany
INIS RN
8321148
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference, No Abstract
Descriptors DEI
ALUMINIUM OXIDES; AUGER ELECTRON SPECTROSCOPY; FILMS; TANTALUM OXIDES; TITANIUM OXIDES
Descriptors DEC
ALUMINIUM COMPOUNDS; CHALCOGENIDES; ELECTRON SPECTROSCOPY; OXIDES; OXYGEN COMPOUNDS; SPECTROSCOPY; TANTALUM COMPOUNDS; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS

Optional Information

Notes
Short communication only.
Secondary number(s)
AED-Conf--77-079-265.