Published April 1995
| Version v1
Journal article
New tilting mechanism of electron gun for reflection high-energy electron diffraction
Creators
- 1. Meiji Univ., Kawasaki, Kanagawa (Japan). School of Science and Technology
Description
A new type of mechanism for tilting a reflection high-energy electron diffraction (RHEED) gun has been designed and constructed, which enables us to change the glancing angle of the primary electron beam when the specimen surface is located not only at a fixed position but also is moved to other positions. This is an advantage when other measurements are simultaneously undertaken with RHEED. RHEED measurements of a Si(110) surface were performed by placing the Si(110) surface at different positions, and the ability was verified. (author)
Additional details
Publishing Information
- Journal Title
- Japanese Journal of Applied Physics. Part 1, Regular Papers and Short Notes
- Journal Volume
- 34
- Journal Issue
- 4 A
- Journal Page Range
- p. 2022-2024.
- ISSN
- 0021-4922
- CODEN
- JAPNDE
INIS
- Country of Publication
- Japan
- Country of Input or Organization
- Japan
- INIS RN
- 27001830
- Subject category
- S43: PARTICLE ACCELERATORS;
- Descriptors DEI
- CRYSTAL GROWTH; ELECTRON BEAMS; ELECTRON DIFFRACTION; ELECTRON GUNS; EPITAXY; INCIDENCE ANGLE; MECHANICAL STRUCTURES; MONITORING; REFLECTION; SURFACES
- Descriptors DEC
- BEAMS; COHERENT SCATTERING; CRYSTAL GROWTH METHODS; DIFFRACTION; LEPTON BEAMS; PARTICLE BEAMS; SCATTERING