Analysis and estimation on composition and property change in atomic level due to radiation damage of materials

In this paper, by using analysis type high resolution ultra high pressure electron microscope operable for in-situ observation and micro composition analysis under electron beam irradiation installed recently to the National Research Institute for Metals, high resolution observation (HRTEM) and Electron energy loss spectroscopy (EELS) analysis at 1000kV were reported. In addition, as an application example, the EELS micro analysis on Ni silicide thin film was conducted. As a result, it was found that the energy resolution at zero loss was 0.7 eV (at original observation, 1.5 eV), and can be conducted stable spectroscopy and image observation. And, as a result of HRTEM and EELS analysis of NiSi2 grown onto Si(100) thin film like an island, a result on local distribution of Ni and Si was obtained. However, a composition analysis on atomic level could be conducted. (G.K.)