Published January 1982 | Version v1
Journal article

Gold diffusion into silicon under low energy ion bombardment

  • 1. AN SSSR, Leningrad. Fiziko-Tekhnicheskij Inst.

Description

no abstract available

Additional details

Additional titles

Original title (Russian)
Диффузия золота в кремний в условиях низкоэнергетической ионной бомбардировки

Publishing Information

Journal Title
Zh. Tekh. Fiz.
Journal Volume
52
Journal Issue
1
Series
Zh. Tekh. Fiz.
Journal Page Range
167-169
ISSN
0044-4642

INIS

Country of Publication
Russian Federation
Country of Input or Organization
USSR
INIS RN
14798874
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
No Abstract
Descriptors DEI
ARGON IONS; DIFFUSION; EV RANGE 100-1000; FILMS; GOLD; ION BEAMS; MONOCRYSTALS; PHYSICAL RADIATION EFFECTS; RADIOMETRIC ANALYSIS; SILICON
Descriptors DEC
BEAMS; CHARGED PARTICLES; CHEMICAL ANALYSIS; CRYSTALS; ELEMENTS; ENERGY RANGE; EV RANGE; IONS; METALS; QUANTITATIVE CHEMICAL ANALYSIS; RADIATION EFFECTS; SEMIMETALS; TRANSITION ELEMENTS

Optional Information

Notes
Short note. For English translation see the journal Soviet Physics - Technical Physics (USA).