Study of zinc oxide films prepared by spray pyrolysis using atomic force microscopy method

The paper presents the procedure of the preparation and the results of studies by using of atomic force microscopy ZnO films synthesized by spray pyrolysis under change of three operating parameters: temperature of the substrate, the molar concentration of precursor, as well as the vacuum in the chamber. It is shown that the temperature increase leads to the more developed surface relief and the increase of concentration of initial solution makes the surface larger roughness. (authors)