Published September 2009
| Version v1
Miscellaneous
Open
Nanohardnes and topography silicon surface modified by means of ion assisted deposition of Ti, Co, Zr, Mo coatings
- 1. Belarus state univ., Minsk (Belarus)
- 2. Belarus state technologycal univ., Minsk (Belarus)
Description
The article is devoted to experimental investigation of mechanical properties of silicon surface modified by means of self ion assisted deposition of Ti, Co, Zr, Mo coatings. The nanoindentation data from coated systems were used for calculation of the hardness and elastic modulus using load and displacement sensing indentation experiments. Atomic Force Microscopy surface observations were used to investigate the topography of modified surfaces. (authors)
Files
41006862.pdf
Files
(437.3 kB)
| Name | Size | Download all |
|---|---|---|
|
md5:a0906371afbd7bcf51b1b2490e7611ce
|
437.3 kB | Preview Download |
System files
(19.3 kB)
| Name | Size | Download all |
|---|
Additional details
Additional titles
- Original title (Russian)
- Нанотвердость и топография поверхности кремния с покрытиями Ti, Co, Zr, Mo, осажденными в условиях ионного ассистирования
Publishing Information
- Imprint Place
- Minsk (Belarus)
- ISBN
- 978-985-476-728-4
- Imprint Title
- Interaction of radiation with solids. Proceedings of 8. International conference
- Imprint Pagination
- 365 p.
- Journal Page Range
- p. 246-248
- Report number
- INIS-BY--089
Conference
- Title
- 8. International conference 'Interaction of radiation with solids'
- Original Conference Title
- 8. Mezhdunarodnaya konferentsiya 'Vzaimodejstvie izluchenij s tverdym telom'
- Dates
- 23-25 Sep 2009
- Place
- Minsk (Belarus)
INIS
- Country of Publication
- Belarus
- Country of Input or Organization
- Belarus
- INIS RN
- 41006862
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ATOMIC FORCE MICROSCOPY; COBALT; ENERGY BEAM DEPOSITION; HARDNESS; IONS; MECHANICAL PROPERTIES; MOLYBDENUM; SILICON; SURFACE COATING; SURFACES; TITANIUM; ZIRCONIUM
- Descriptors DEC
- CHARGED PARTICLES; DEPOSITION; ELEMENTS; MECHANICAL PROPERTIES; METALS; MICROSCOPY; REFRACTORY METALS; SEMIMETALS; SURFACE COATING; TRANSITION ELEMENTS
Optional Information
- Notes
- 2 refs., 3 tabs., 6 figs. Imprint:Vzaimodejstvie izluchenij s tverdym telom. Materialy 8. Mezhdunarodnoj konferentsii