Published September 2009 | Version v1
Miscellaneous Open

Nanohardnes and topography silicon surface modified by means of ion assisted deposition of Ti, Co, Zr, Mo coatings

  • 1. Belarus state univ., Minsk (Belarus)
  • 2. Belarus state technologycal univ., Minsk (Belarus)

Description

The article is devoted to experimental investigation of mechanical properties of silicon surface modified by means of self ion assisted deposition of Ti, Co, Zr, Mo coatings. The nanoindentation data from coated systems were used for calculation of the hardness and elastic modulus using load and displacement sensing indentation experiments. Atomic Force Microscopy surface observations were used to investigate the topography of modified surfaces. (authors)

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Part of:
Interaction of radiation with solids. Proceedings of 8. International conference

Additional details

Additional titles

Original title (Russian)
Нанотвердость и топография поверхности кремния с покрытиями Ti, Co, Zr, Mo, осажденными в условиях ионного ассистирования

Publishing Information

Imprint Place
Minsk (Belarus)
ISBN
978-985-476-728-4
Imprint Title
Interaction of radiation with solids. Proceedings of 8. International conference
Imprint Pagination
365 p.
Journal Page Range
p. 246-248
Report number
INIS-BY--089

Conference

Title
8. International conference 'Interaction of radiation with solids'
Original Conference Title
8. Mezhdunarodnaya konferentsiya 'Vzaimodejstvie izluchenij s tverdym telom'
Dates
23-25 Sep 2009
Place
Minsk (Belarus)

INIS

Country of Publication
Belarus
Country of Input or Organization
Belarus
INIS RN
41006862
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ATOMIC FORCE MICROSCOPY; COBALT; ENERGY BEAM DEPOSITION; HARDNESS; IONS; MECHANICAL PROPERTIES; MOLYBDENUM; SILICON; SURFACE COATING; SURFACES; TITANIUM; ZIRCONIUM
Descriptors DEC
CHARGED PARTICLES; DEPOSITION; ELEMENTS; MECHANICAL PROPERTIES; METALS; MICROSCOPY; REFRACTORY METALS; SEMIMETALS; SURFACE COATING; TRANSITION ELEMENTS

Optional Information

Notes
2 refs., 3 tabs., 6 figs. Imprint:Vzaimodejstvie izluchenij s tverdym telom. Materialy 8. Mezhdunarodnoj konferentsii