Laser annealing of thin film electroluminescent devices deposited at a high rate using high target utilization sputtering

This paper presents the photoluminescent (PL) and electroluminescent (EL) characteristics of ZnS:Mn deposited at room temperature using high target utilization sputtering (HiTUS). Significant improvements in PL intensity are seen when ZnS:Mn is deposited using HiTUS instead of conventional RF magnetron sputtering. When incorporated as part of a complete EL device with yttrium oxide forming the dielectric layers and indium tin oxide used as the top contact electrode, localized laser annealing of the ZnS:Mn phosphor layer is shown to provide enhancement of the EL characteristics