Published August 16, 1993 | Version v1
Journal article

Ion beam mixing at metal-oxide interfaces

  • 1. Pontificia Univ. Catolica do Rio de Janeiro, RJ (Brazil). Dept. de Fisica
  • 2. Rio Grande do Sul Univ., Porto Alegre, RS (Brazil). Inst. de Quimica

Description

Atomic mixing at Cr-SiO2 interfaces induced by noble gas (Ar, Kr and Xe) ion bombardment was studied by means of Rutherford backscattering spectrometry. The amount of mixing was determined as a function of fluence (1-20 1015 ions cm-2), substrate temperature (300-800 K) and deposited energy at the interface. These results indicate the prevalence of the ballistic mixing mechanism. (author)

Additional details

Publishing Information

Journal Title
Journal of Physics. Condensed Matter
Journal Volume
5
Journal Issue
suppl.33A
Journal Page Range
p. A301-A302.
ISSN
0953-8984
CODEN
JCOMEL

Conference

Title
7. Latin-American symposium on surface science.
Acronym
SLAFS7-CIACSA1
Dates
15-20 Nov 1992.
Place
Bariloche (Argentina).